Southern Dynamics (P) Ltd

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VM-2000-XYZ µ-Inspector
Video Microscope
with Automated XYZ Control


	*Low Cost*
	*Easy to Use*
	*Built-in Epi-illumination*
	*Uses standard "filter cube"*
	*Transmitted illumination*
	*Standard C-mount camera port*
	*Automated Focus Control (optional)*

The VM-2000-XYZ Micro-Inspector video microscope from ASI is a full featured device that works well in a wide range of applications. The basic VM-2000-XYZ unit consists of a finely crafted optical microscope and camera mounted on one of ASI's precision linear stages plus ASI's automated XY stage and a three-axis controller.

The linear stage provides precise control of focusing through the use of a closed-loop DC servomotor employing a high-resolution rotary encoder for positional feedback. In this arrangement, a focusing resolution of 0.1 µm can easily be achieved. For typical small focusing moves, the repeatability is less than 0.3 µm. With standard rotary encoders, XY repeatability is typically 800 nm. Optional linear encoders improve XY repeatability to less than 300 nm (typical).

The position of the linear stage (point-of-focus) as well as the XY stage coordinates are displayed on the LCD of the MS-2000 control unit and is also available via computer query. Control of XY positioning, Z-axis focusing, and illumination intensity can also be controlled via serial communication. An auto-focus option is also available.

The combination of the finely crafted optical microscope mounted onto one of ASI's precision linear stages combined with one of ASI's automated XY stages allows the Micro-Inspector to be an excellent automated inspection station.

The video microscope offers built-in epi-illumination via a white LED. The LED can easily be exchanged to provide illumination in a range of wavelengths. Since epi-illumination is a reflected illumination from above, i.e., through the objective, the video microscope works very well in inspection applications requiring a reflected light source such as semiconductor manufacturing. Since the basic VM-2000 unit uses a standard filter cube, and the LED's can be selected for a range of excitation wavelenghts, the unit also works very well for fluorescence microscopy applications. For more demanding fluorescence applications, the unit can be used with a scanning monochromator to provide a bright tunable excitation source.

The Micro-Inspector can be mounted, as shown in the photo above, on an optional stand assembly, or can be mounted on a user-supplied base.

The Micro-Inspector can be used with a variety of objective lenses and CCD cameras. The table below shows the approximate magnification on the viewing monitor and the sample field of view for various configurations.

Objective Lens	1/2" CCD Camera		1/3" CCD Camera
Objective Lens	Objective Field of View	Magnification on 9" Monitor	Objective Field of View	Magnification on 9" Monitor
4x	1.6 x 1.2 mm	110x	1.2 x 0.9 mm	150x
10x	0.64 x 0.48 mm	280x	0.48 x 0.36 mm	380x
40x	0.16 x 0.12 mm	1100x	0.12 x 0.09 mm	1500x

Specifications

Microscope	160 mm Tube Length
	Use with DIN Standard Objectives (with 0.797-36TPI, Whitworth Thread)
	Standard C-Mount camera fitting
Illumination	Uses "Filter Cube" type beam splitter w/ 70/30 splitter
	Cube accepts 18 mm dia. filters for fluorescent illumination
	Ultra-bright white LED provides >1.5mW light output power
	LED intensity control via MFC-2000 controller
Focus Control	MFC-2000 single axis automated control
	2" (50 mm) range of travel
	< 0.1 µm resolution
	< 0.3 µm repeatability (typical)
	Maximum z-axis (focus) speed: 1.6 mm/sec
XY Stage	100 mm x 100 mm range of travel
	0.083 µm resolution (encoder step)
	< 0.8 µm repeatability (typical)
	Maximum velocity: 7mm/sec

MT-2000 XYZ-Theta
Positioning System

The MT-2000 is a high performance positioning system capable of sub-micron resolution. The system, shown, features a 100x100 mm XY stage, a 50mm Z-axis focusing positioner, a vacuum-chuck rotary stage, and a motorized 16X zoom video microscope. The X, Y, Z, and Theta axes derive their precise control through the use of closed-loop DC servomotors employing high-resolution rotary encoders for positioning feedback. By using closed-loop control, there is no chance that the system will become lost, as can occur with open loop micro-stepped positioners after a number of moves and direction changes.

The MT-2000's X, Y, and Z axes utilizes crossed-roller slides, high-precision lead screws, and zero-backlash miniature geared servomotors for smooth and accurate motion. The Theta drive utilizes dual class-7 custom bearings for ultra-low axial/ angular runout, and precision worm gears to turn a one inch table. The microprocessor-controlled MS-2000 control unit provides for RS-232 and USB communication with a host computer plus local control via joystick, control knob and buttons.

Options include XY stages with motion up to 12 inches (300 mm) and Z-axis positioners to 4 inches (100 mm). Optional lead screw choices range from super-coarse to ultra-fine for high-speed versus high-resolution requirement tradeoffs. Linear encoder options are available on the X, Y, and Z axes to provide scale accuracies of 0.5 µm per 10 mm and 1.5 µm per 10 0mm, resolutions down to 50 nm, and repeatabilities better than 300 nm compared to the standard rotary encoder's typical 800 nm rating. The system controller can be configured with optional auto focus capabilities and TTL input and output for triggering and synchronization.

Accessories can include motorized multi-axis micromanipulators and probing devices, zooming video microscopes with various illumination alternatives, cameras, monitors, and much more.

Features

Compact ergonomic tabletop control unit size is 9 x 23 x 16½ cm (3½ x 9 x 6½ inches)
Closed-loop DC servo control of the X, Y, Z and Theta axes for precise positioning
Wide dynamic speed range with adjustable trapezoidal move profiles
Electronic torque limit on drives for "built-in" limit protection
Sub-micron-scale repeatability on all axes
Hall-effect limit sensors on X, Y, and Z axes
Smooth adjustable dual-range joystick control
Backlit LCD display shows X, Y, Z and Theta coordinates
Microprocessor control with RS-232 serial and USB communications
"Zero", "Home", and "Zoom" buttons for simple stand-alone operations

Specifications (with standard rotary encoders, 6.35 mm pitch XYZ lead screws, and 5,120:1 Theta worm drive ratio)

XYZ axis range of travel	100 mm x 100 mm x 50 mm (4" x 4" x 2")
XYZ axis resolution	< 0.1 µm
XYZ axis RMS repeatability (typical)	< 0.8 µm
XYZ axis accuracy	0.25 µ/mm
XYZ axis maximum velocity	7 mm/sec
Theta axis range of travel	Unlimited
Theta axis resolution	< 7 arc-sec
Theta RMS repeatability (typical)	< 30 arc-sec
Theta axis accuracy	100 arc-sec
Theta maximum velocity	20 degrees/sec

XYZ Lead Screw Pitch Options	Rotary Encoder Resolution	Maximum Speed (Dynamic range = 400)
12.70 mm	176 nm	14 mm/sec
6.35 mm	88 nm	7 mm/sec
1.57 mm	22 nm	1.75 mm/sec
0.318 mm	4.4 nm	0.35 mm/sec

Modular Infinity Microscope

ASI's modular microscope system offers a flexible solution for specialized applications. Major components are connected together with a universal mating ring which provides accurate alignment with rotational flexibility.

Basic Components:

Tube Lens Section - image forming section with 200mm Focal Length tube lens
C-Mount - Camera Port
Infinity Space Beam Splitter Cube - Can be used for Epi-Fluorescence Filter Cube or as Right-Angle Objective Adapter
Objective Adapter - Options for Nikon CF160, Mitutoyo, or Olympus RMS-Thread Objectives
Universal Coupling - Used on all Infinity-Space Components for Design Flexibility

Optional Components:

C-mount Beam Splitter - Provides a Second Camera / Detector Port
Filter Wheel Adapter - Use with ASI FW-1000 Filter Wheel.
Motorized positioner - Use ASI LS-50 Stage to focus the Microscope System
Inverted or Upright test stand and ASI motorized stages

Specifications

Tube Lens	200 mm Focal Length
Beam Splitter	Olympus AX/BX/IX Series Cube
Beam Splitter Optical Length	60 mm
Objectives Supported	Nikon CF160 Series Mitutoyo LWD Series *Olympus ∞ Corrected
Camera Port	C-Mount

*Olympus objectives will have overall magnification 1.11 x objective marking

Large Motorized XY Stages

ASI offers larger custom stages in addition to our standard 100 x 100 mm (4 x 4 inch) models. Larger travel distances may be required for large microscopes, for semiconductor inspection, and for other demanding applications. By utilizing ASI's proven line of closed-loop DC servomotor electronics, these larger stages can be configured with a wide range of speed and resolution options. (Gantry stages are also available.)

Model	XY Length of Travel
MS-6600	150 x 150 mm (6 x 6 inches)
MS-8000	200 x 200 mm (8 x 8 inches)
MS-10000	250 x 250 mm (10 x 10 inches)
MS-12000	300 x 300 mm (12 x 12 inches)

Features

Closed-loop DC servo control of the X and Y axes for precise positioning
Wide dynamic speed range with XY joystick control
Backlit LCD display shows axis coordinates
"Zero" and "Home" button for simple stand-alone operations
Compact ergonomic tabletop control unit size is
9 cm x 23 cm x 16½ cm (3" x 9" x 6") [H x W x D]
Microprocessor control with RS-232 serial and USB communications
Proven operation with many popular software packages

Specifications

With 3.7:1 Gearhead Motor, and with Lead Screw Pitch:	Rotary Encoder Resolution	RMS Repeatability (Typical)	Maximum Speed
25.40 mm (Ultra-coarse)	3.36 µm	20 µm	400 mm/sec
12.70 mm (Super-coarse)	1.68 µm	12 µm	200 mm/sec
6.35 mm (Standard)	0.84 µm	8 µm	100 mm/sec
1.57 mm (Fine)	0.21 µm	4.5 µm	25 mm/sec

With 141:1 Gearhead Motor, and with Lead Screw Pitch:	Rotary Encoder Resolution	RMS Repeatability (Typical)	Maximum Speed
25.40 mm (Ultra-coarse)	88 nm	3.5 µm	24 mm/sec
12.70 mm (Super-coarse)	44 nm	1.6 µm	12 mm/sec
6.35 mm (Standard)	22 nm	0.8 µm	6.4 mm/sec
1.57 mm (Fine)	5.5 nm	0.5 µm	1.6 mm/sec

* Standard Lead Screw Accuracy is 0.25 µm per millimeter

Optional Linear Encoders - X and Y-axis Linear Encoders incorporated into the stage plates for ultra-precise positioning and high-resolution repeatability.

Linear Encoder Resolution	Scale Accuracy
10 nm (up to 50 mm/sec) 20 nm (up to 100 mm/sec) 50 nm (up to 250 mm/sec) 100 nm (up to 500 mm/sec)	± 3 µm per length of scale

* Typical RMS Repeatability with Linear Encoders: 1 micron

Additional Large Stage Information
Request MS-6000 Pricing	Request MS-8000 Pricing	MS-8000 Stage Inserts	Request MS-10000 Pricing	Request MS-12000 Pricing